Chlorosilane is a hazardous chemical compound which is used as a raw material in the production of silicone. Despite strict restrictions, accidental spillage of chlorosilane is often reported. However, human exposure was rarely reported in the past decades and the effect on humans is barely known. We report cases of human exposure to an accidental trichlorosilane spill. Three middle aged male industrial workers visited our emergency department after exposure to trichlorosilane. They presented with shortness of breath and burns on multiple sites. Chest radiograph and laboratory studies were performed. None of the reports showed serious results and were discharged after conservative management.